Measurement technology for micro-nanometer devices / Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University.
By: Zhang, Wendong [author.]
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Material type: 
BookPublisher: Solaris South Tower, Singapore : John Wiley & Sons, Inc., [2017]Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9781118717998 (epub); 1118717996 (epub); 9781118717981 (pdf); 1118717988 (pdf); 9781118717974; 111871797X.Subject(s): Microtechnology -- Measurement | Nanotechnology -- Measurement | Microelectromechanical systems -- Testing | Physical measurements | TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & TradesGenre/Form: Electronic books. | Electronic books.Additional physical formats: Print version:: Measurement technology for micro-nanometer devicesDDC classification: 681/.2 Online resources: Wiley Online Library Includes bibliographical references and index.
Description based on print version record and CIP data provided by publisher.
Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.
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