Zhang, Wendong,
Measurement technology for micro-nanometer devices / Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University. - 1 online resource.
Includes bibliographical references and index.
Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.
9781118717998 (epub) 1118717996 (epub) 9781118717981 (pdf) 1118717988 (pdf) 9781118717974 111871797X
2015032319
Microtechnology--Measurement.
Nanotechnology--Measurement.
Microelectromechanical systems--Testing.
Physical measurements.
TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades
Electronic books.
Electronic books.
TA418.9.N35
681/.2
Measurement technology for micro-nanometer devices / Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University. - 1 online resource.
Includes bibliographical references and index.
Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.
9781118717998 (epub) 1118717996 (epub) 9781118717981 (pdf) 1118717988 (pdf) 9781118717974 111871797X
2015032319
Microtechnology--Measurement.
Nanotechnology--Measurement.
Microelectromechanical systems--Testing.
Physical measurements.
TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades
Electronic books.
Electronic books.
TA418.9.N35
681/.2