| 000 | 01809cam a2200373Ii 4500 | ||
|---|---|---|---|
| 001 | 9781315370514 | ||
| 008 | 180706t20172017flua ob 001 0 eng d | ||
| 020 |
_a9781315370514 _q(e-book : PDF) |
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| 020 |
_a9781315334363 _q(e-book: Mobi) |
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| 020 |
_z9781498725576 _q(hardback) |
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| 024 | 7 |
_a10.1201/9781315370514 _2doi |
|
| 035 | _a(OCoLC)966358888 | ||
| 040 |
_aFlBoTFG _cFlBoTFG _erda |
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| 050 | 4 |
_aTK7874.843 _b.S27 2017 |
|
| 082 | 0 | 4 |
_a621.381531 _bS243 |
| 100 | 1 |
_aSarangan, Andrew, _eauthor. _917891 |
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| 245 | 1 | 0 |
_aNanofabrication : _bprinciples to laboratory practice / _cAndrew Sarangan, University of Dayton, OH, USA. |
| 264 | 1 |
_aBoca Raton : _bCRC Press, Taylor & Francis Group, _c[2017] |
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| 264 | 4 | _c©2017 | |
| 300 | _a1 online resource | ||
| 336 |
_atext _2rdacontent |
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| 337 |
_acomputer _2rdamedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 490 | 1 | _aOptical sciences and applications of light | |
| 505 | 0 | _aChapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication. | |
| 650 | 0 |
_aSemiconductors _xEtching. _99890 |
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| 650 | 0 |
_aNanostructured materials _xDesign and construction. _917892 |
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| 650 | 0 |
_aNanoelectronics _xExperiments. _917893 |
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| 650 | 0 |
_aNanolithography. _917894 |
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| 776 | 0 | 8 |
_iPrint version: _z9781498725576 _w(DLC) 2016008970 |
| 830 | 0 |
_aOptical sciences and applications of light. _913599 |
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| 856 | 4 | 0 |
_uhttps://www.taylorfrancis.com/books/9781315370514 _zClick here to view. |
| 942 | _cEBK | ||
| 999 |
_c71665 _d71665 |
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