000 04422nam a22005655i 4500
001 978-3-319-06617-2
003 DE-He213
005 20200421112049.0
007 cr nn 008mamaa
008 140515s2014 gw | s |||| 0|eng d
020 _a9783319066172
_9978-3-319-06617-2
024 7 _a10.1007/978-3-319-06617-2
_2doi
050 4 _aTJ212-225
072 7 _aTJFM
_2bicssc
072 7 _aTEC004000
_2bisacsh
082 0 4 _a629.8
_223
100 1 _aFleming, Andrew J.
_eauthor.
245 1 0 _aDesign, Modeling and Control of Nanopositioning Systems
_h[electronic resource] /
_cby Andrew J. Fleming, Kam K. Leang.
264 1 _aCham :
_bSpringer International Publishing :
_bImprint: Springer,
_c2014.
300 _aXVI, 411 p. 261 illus., 180 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aAdvances in Industrial Control,
_x1430-9491
505 0 _aIntroduction -- Piezoelectric Transducers -- Types of Nanopositioners -- Mechanical Design: Flexure-based Nanopositioners -- Position Sensors -- Shunt Control -- Feedback Control -- Force Feedback Control -- Feedforward Control -- Command Shaping -- Hysteresis Modeling and Control -- Charge Drives -- Noise in Nanopositioning Systems -- Electrical Considerations.
520 _aCovering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading. Advances in Industrial Control aims to report and encourage the transfer of technology in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. The series offers an opportunity for researchers to present an extended exposition of new work in all aspects of industrial control.
650 0 _aEngineering.
650 0 _aControl engineering.
650 0 _aMechatronics.
650 0 _aIndustrial engineering.
650 0 _aProduction engineering.
650 0 _aManufacturing industries.
650 0 _aMachines.
650 0 _aTools.
650 1 4 _aEngineering.
650 2 4 _aControl.
650 2 4 _aMechatronics.
650 2 4 _aManufacturing, Machines, Tools.
650 2 4 _aIndustrial and Production Engineering.
700 1 _aLeang, Kam K.
_eauthor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783319066165
830 0 _aAdvances in Industrial Control,
_x1430-9491
856 4 0 _uhttp://dx.doi.org/10.1007/978-3-319-06617-2
912 _aZDB-2-ENG
942 _cEBK
999 _c57116
_d57116