| 000 | 00492nam a2200181Ia 4500 | ||
|---|---|---|---|
| 999 |
_c48412 _d48412 |
||
| 008 | 190703s9999 xx 000 0 und d | ||
| 020 | _a9780070487093 | ||
| 082 | _a621.381 H87M | ||
| 100 | _aHsu, Tai, Ran. | ||
| 245 | 0 | _aMEMS and Microsystems: Design and Manufacture | |
| 260 |
_aNew Delhi _bTata McGraw-Hill Education _c2002 |
||
| 300 | _ap. 436 | ||
| 650 | _bThermofluid Engineering | ||
| 650 | _bScaling Laws | ||
| 650 | _bMicrosystems Design | ||
| 650 | _bLaminar | ||
| 942 | _cDBK | ||