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008 190711s9999 xx 000 0 und d
020 _a352740502X
082 _a669.942 W682
100 _aWILKENING ,G.
245 0 _aNANOSCALE CALIBRATION STANDARDS AND METHODS : DIMENSIONAL AND RELATED MEASUREMEN
260 _aWeinheim
_bWiley
_c2005
300 _axxii+519p.,25X17cms.
942 _cBK
_2DDC
999 _c32349
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