| 000 | 00338nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a3540583173 | ||
| 082 | _a621.38152 G736 | ||
| 100 | _aGRAFF,K | ||
| 245 | 0 | _aMETAL IMPURITIES IN SILICON-DEVICE FABRICATION | |
| 260 |
_aBERLIN _bSpringer _c1995 |
||
| 300 | _a24X16 | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c26327 _d26327 |
||