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Principles of microelectromechanical systems / Ki Bang Lee.

by Lee, Ki Bang [author.] | Lee, Ki Bang | IEEE Xplore (Online Service) [distributor.] | John Wiley & Sons [publisher.].

Material type: book Book; Format: available online remote Publisher: Hoboken, New Jersey : WILEY/IEEE Press, c2011Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [2010]Other title: Principles of MEMS.Online access: Abstract with links to resource Availability: No items available

Principles of microelectromechanical systems / Ki Bang Lee.

by Lee, Ki Bang [author.] | Lee, Ki Bang | IEEE Xplore (Online Service) [distributor.] | John Wiley & Sons [publisher.].

Material type: book Book; Format: available online remote Publisher: Hoboken, New Jersey : WILEY/IEEE Press, c2011Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [2010]Other title: Principles of MEMS.Online access: Abstract with links to resource Availability: No items available