Surface metrology for micro- and nanofabrication / (Record no. 82503)
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000 -LEADER | |
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fixed length control field | 04574cam a2200481 a 4500 |
001 - CONTROL NUMBER | |
control field | on1202462989 |
003 - CONTROL NUMBER IDENTIFIER | |
control field | OCoLC |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20230516165911.0 |
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
fixed length control field | m o d |
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
fixed length control field | cr un|---aucuu |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 201031s2021 ne o 000 0 eng d |
040 ## - CATALOGING SOURCE | |
Original cataloging agency | EBLCP |
Language of cataloging | eng |
Description conventions | pn |
Transcribing agency | EBLCP |
Modifying agency | YDX |
-- | OPELS |
-- | OCLCF |
-- | OCLCO |
-- | OCLCQ |
-- | OCLCO |
-- | K6U |
-- | OCLCQ |
019 ## - | |
-- | 1201298452 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780128178515 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0128178515 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
Canceled/invalid ISBN | 9780128178508 |
035 ## - SYSTEM CONTROL NUMBER | |
System control number | (OCoLC)1202462989 |
Canceled/invalid control number | (OCoLC)1201298452 |
050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
Classification number | TA418.9.N35 |
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 620.50287 |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | Gao, Wei, |
Titles and words associated with a name | Ph. D. |
9 (RLIN) | 69000 |
245 10 - TITLE STATEMENT | |
Title | Surface metrology for micro- and nanofabrication / |
Statement of responsibility, etc. | Wei Gao. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Amsterdam : |
Name of publisher, distributor, etc. | Elsevier, |
Date of publication, distribution, etc. | [2021] |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 1 online resource (452 pages) |
336 ## - CONTENT TYPE | |
Content type term | text |
Content type code | txt |
Source | rdacontent |
337 ## - MEDIA TYPE | |
Media type term | computer |
Media type code | c |
Source | rdamedia |
338 ## - CARRIER TYPE | |
Carrier type term | online resource |
Carrier type code | cr |
Source | rdacarrier |
490 1# - SERIES STATEMENT | |
Series statement | Micro and Nano Technologies Ser. |
588 0# - SOURCE OF DESCRIPTION NOTE | |
Source of description note | Print version record. |
505 0# - FORMATTED CONTENTS NOTE | |
Formatted contents note | Front Cover -- Surface Metrology for Micro- and Nanofabrication -- Copyright Page -- Dedication -- Contents -- Preface -- 1 Noncontact scanning electrostatic force microscope -- 1.1 Introduction -- 1.2 Principle of electrostatic force microscope for surface profile measurement -- 1.3 Instrumentation of electrostatic force microscope -- 1.3.1 Instrument configuration -- 1.3.2 Electrostatic force microscope probe fabrication -- 1.3.3 Electrostatic force microscope electronics -- 1.4 Characterization of the electrostatic force microscope -- 1.4.1 Tip-to-sample distance measurement |
505 8# - FORMATTED CONTENTS NOTE | |
Formatted contents note | 1.4.2 Measurement of surface topography -- 1.4.3 The vertical reciprocating scan mode -- 1.5 Summary -- References -- 2 Quartz tuning fork atomic force microscope -- 2.1 Introduction -- 2.2 Tungsten probe QTF-AFM -- 2.2.1 Self-oscillation QTF-AFM -- 2.2.2 External-oscillation QTF-AFM -- 2.3 Glass probe QTF-AFM -- 2.3.1 Fabrication of the glass probe -- 2.3.2 Optimization of the QTF glass probe -- 2.3.3 Surface profile measurement by the QTF glass probe -- 2.4 Summary -- References -- 3 Micropipette ball probing system -- 3.1 Introduction -- 3.2 Fabrication of the micropipette probe |
505 8# - FORMATTED CONTENTS NOTE | |
Formatted contents note | 3.3 The probing system -- 3.4 Measurement of microslit -- 3.5 Summary -- References -- 4 Low-force elastic beam surface profiler -- 4.1 Introduction -- 4.2 Cantilever beam surface profiler -- 4.3 Both ends supported beam surface profiler -- 4.4 Rotary die cutter edge profile measurement -- 4.5 Summary -- References -- 5 Linear-scan micro roundness measuring machine -- 5.1 Introduction -- 5.2 The stitching linear-scan method -- 5.3 Linear-scan micro roundness measuring machine -- 5.4 Improved setup with a round positioning jig -- 5.5 Summary -- References -- 6 Micro-gear measuring machine |
505 8# - FORMATTED CONTENTS NOTE | |
Formatted contents note | 6.1 Introduction -- 6.2 The micro-gear measuring machine -- 6.3 Self-calibration and compensation of setting errors -- 6.4 Internal micro-gear measurement -- 6.5 Summary -- References -- 7 On-machine length gauge surface profiler -- 7.1 Introduction -- 7.2 General issues in on-machine measurement -- 7.3 Satellite mirror surface profiler -- 7.4 Scroll surface profiler -- 7.5 Summary -- References -- 8 On-machine air-bearing surface profiler -- 8.1 Introduction -- 8.2 Horizontal air-bearing profiler -- 8.3 Vertical air-bearing profiler -- 8.4 Dynamic behavior of air-bearing profiler -- 8.5 Summary |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc. note | References-9 On-machine atomic force microscope-9.1 Introduction-9.2 On-machine spiral scan atomic force microscope-9.3 On-machine automatic alignment atomic force microscope-9.4 Summary-References-10 On-machine roll profiler-10.1 Introduction-10.2 On-machine two-probe profiler-10.3 On-machine four-probe profiler-10.4 Summary-References-11 In-process fast tool servo profiler-11.1 Introduction-11.2 Force sensor-integrated fast tool servo-11.3 In-process surface profile measurement-11.4 In-process tool setting-11.5 Summary-References. |
500 ## - GENERAL NOTE | |
General note | 12 Self-calibration of probe tip radius and cutting edge sharpness. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Nanostructured materials |
General subdivision | Measurement. |
9 (RLIN) | 69001 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Nanomanufacturing. |
9 (RLIN) | 17398 |
650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Nanofabrication. |
Authority record control number or standard number | (CaQQLa)000287898 |
9 (RLIN) | 68562 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Nanomanufacturing. |
Source of heading or term | fast |
Authority record control number or standard number | (OCoLC)fst01894718 |
9 (RLIN) | 17398 |
776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
Relationship information | Print version: |
Main entry heading | Gao, Wei. |
Title | Surface Metrology for Micro- and Nanofabrication. |
Place, publisher, and date of publication | San Diego : Elsevier, �2020 |
International Standard Book Number | 9780128178508 |
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
Uniform title | Micro & nano technologies. |
9 (RLIN) | 69002 |
856 40 - ELECTRONIC LOCATION AND ACCESS | |
Materials specified | ScienceDirect |
Uniform Resource Identifier | <a href="https://www.sciencedirect.com/science/book/9780128178508">https://www.sciencedirect.com/science/book/9780128178508</a> |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | eBooks |
No items available.