Ivanov, Alexey.
Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments / [electronic resource] : by Alexey Ivanov. - 1st ed. 2018. - XXIX, 316 p. 141 illus., 3 illus. in color. online resource.
Silicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing
9783658192389
10.1007/978-3-658-19238-9 doi
Microtechnology.
Microelectromechanical systems.
Engineering mathematics.
Engineering—Data processing.
Thermodynamics.
Heat engineering.
Heat transfer.
Mass transfer.
Microsystems and MEMS.
Mathematical and Computational Engineering Applications.
Engineering Thermodynamics, Heat and Mass Transfer.
TK7875
621.381
Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments / [electronic resource] : by Alexey Ivanov. - 1st ed. 2018. - XXIX, 316 p. 141 illus., 3 illus. in color. online resource.
Silicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing
9783658192389
10.1007/978-3-658-19238-9 doi
Microtechnology.
Microelectromechanical systems.
Engineering mathematics.
Engineering—Data processing.
Thermodynamics.
Heat engineering.
Heat transfer.
Mass transfer.
Microsystems and MEMS.
Mathematical and Computational Engineering Applications.
Engineering Thermodynamics, Heat and Mass Transfer.
TK7875
621.381