Sarangan, Andrew,
Nanofabrication : principles to laboratory practice / Andrew Sarangan, University of Dayton, OH, USA. - 1 online resource - Optical sciences and applications of light . - Optical sciences and applications of light. .
Chapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication.
9781315370514 9781315334363
10.1201/9781315370514 doi
Semiconductors--Etching.
Nanostructured materials--Design and construction.
Nanoelectronics--Experiments.
Nanolithography.
TK7874.843 / .S27 2017
621.381531 / S243
Nanofabrication : principles to laboratory practice / Andrew Sarangan, University of Dayton, OH, USA. - 1 online resource - Optical sciences and applications of light . - Optical sciences and applications of light. .
Chapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication.
9781315370514 9781315334363
10.1201/9781315370514 doi
Semiconductors--Etching.
Nanostructured materials--Design and construction.
Nanoelectronics--Experiments.
Nanolithography.
TK7874.843 / .S27 2017
621.381531 / S243